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LumiGNtech co., Ltd.

R&D

 
R&D Publications

Publications

Paper


Journal

Date

Title

PSS A (Physica Status Solidi A) https//doi.org/10.1002/pssa.202200835

2023.03

Realization of low dislocation density AlN on patterned sapphire substrate by hydride vapor-phase epitaxy for deep ultraviolet light-emitting diodes

Journal of Nanoscience and Nanotechnology, 2021 Sep 1; 21(9): 4881-4885. https//doi.org/ 10.1166/jnn.2021.19258.

2021.09

High Quality AlN Layer Grown on Patterned Sapphire Substrates by Hydride Vapor-Phase Epitaxy-A Route for Cost Efficient AlN Templates for Deep Ultraviolet Light Devices

Materials Science in semiconductor Processing Volium 123, 1 March 2021. 105565

2021.03 

The growth of HVPE α-Ga2O3 crystals and its solar-blind UV photodetector applications

Materials Science in semiconductor Processing Volium 123, 1 March 2021. 105534

2021.03 

Structural characteristics of α-Ga2O3 films grown on sapphire by halide vapor phase epitaxy

Journal of materials chemistry. C, Materials for optical and electronic devices v.8 no.41 , 2020, pp.14431 - 14438

2020.11

Nanovoid-driven highly crystalline aluminum nitride and its application in solar-blind UV photodetectors

Applied surface science v.505 , 2020, pp.144615

2020.03

High crystalline aluminum nitride via highly enhanced adatom diffusion driven by point defect complex

 Journal Korean Inst. Electr. Mater. Eng., Vol. 31, No. 6, pp. 386-391, September 2018, https//doi.org/10.4313/JKEM.2018.31.386

2018.09

Crystalline Properties of GaN Layers Grown on PSS and AlN Buffered PSS by HVPE Method

 

Journal of Crystal Growth, 493 (2018) 8-14,
https//doi.org/10.1016/j.jcrysgro.2018.04.022

 

2018.04

Characteristic comparison between GaN layer grown on c-plane cone shpe patterned sapphire substrate and planar c-plance sapphire substrate by HVPE

Journal of the Korean institute of electronic material engineers v.30 no.7 , 2017, pp.427 - 431

2017.07

Properties of Beta-Ga2O3 Film from the Furnace Oxidation of Freestanding GaN

Journal of the Korean institute of electronic material engineers v.29 no.11 , 2016 , pp.702 - 706 

2016.11

High Quality Free-Standing GaN Substrate by Using Self-Separation Method

Journal of the Korean Crystal Growth and Grystal Technology, Vol. 26, No. 3 (2016) 89-94. https://doi.org/10.6111/JKCGCT.2016.26.3.089

2016.06

Multi-step growth of a-plane GaN epitaxial layer on r-plane sapphire substrate by HVPE method

Journal of the Korean institute of electronic material engineers v.29 no.6 , 2016, pp.348 - 352

2016.06

Properties of GaN Film Grown on AlN/PSS Template by Hydride Vapor Phase Epitaxy

Journal of the Korean institute of electronic material engineers v.29 no.1 , 2016, pp.30 - 34

2016.01

Control of Bowing in Free-standing GaN Substrate by Using Selective Etching of N-polar Face

Journal of the Korean institute of electronic material engineers v.28 no.12 , 2015, pp.776 - 780

2015.12

Effect of the Control of Bowing in Free-standing GaN by Mechanical Polishing

Journal of the Korean institute of electronic material engineers v.28 no.11 , 2015, pp.711 - 714

2015.11

High Quality AlN Layer Regrown on AlN Nanostructure by Hydride Vapor Phase Epitaxy

Journal of the Korean crystal growth and crystal technology v.25 no.2 , 2015, pp.56 - 61

2015.04

The effects of growth temperatures and V/III ratios at 1000℃ for a-plane GaN epi-layer on r-plane sapphire grown by HVPE

Joural of the Korean Physical Society, Vol. 66, No. 6 March 2015, pp.994~1000, https://doi.org/10.3938/jkps.66.994

2015.03

Effects of Group V/III ratio and GaN inter-layer on the crystal quality of InN grown by HVPE method

Journal of the Korean Crystal Growth and Grystal Technology , Vol. 24, No. 3 (2014) 89-93, https://doi.org/10.6111/JKCGCT.2014.24.3.089

2014.06

Effects of the V//III ratio on a-plane GaN epitaxial layer on r-plane sapphire grown by HVPE

Physica Status Solidi C, 11, No. 3-4, 477-482 (2014), https://doi.org/ 10.1002/pssc.201300514

2014.03

The Control of mechanical bow for GaN substrate grown by HVPE with relatively longer radiius of lattice curvature

Korean journal of materials research v.23 no.12 , 2013, pp.732 - 736

2013.12

Effect of V/III Ratio Variation on the Properties of AlN Epilayers in HVPE

Journal of Crystal Growth Vol. 370, 1 Issure1, 1 May 2013, pp 249~253, https://doi.org/ 10.1016/j.jcrysgro.2012.08.040

2013.05

Epitaxy of GaN on Si(111) substrate by the hydride vapor phase epitaxy method

Journal of Crystal Growth Vol. 346, Issue 1, 1 May 2012, Pages 83-88, https://doi.org/ 10.1016/j.jcrysgro.2012.02.023

2012.05

“Effect of the growth temperature  on the properties of AlxGa1-xN epilayers grown by HVPE”

Journal of Ceramic Processing Research, Vol. 13, No. 6. pp. 820~824 (2012) http://doi.org/10.36410/jcpr.2012.13.6.820

2012.02

“Effect of high temperature AlN buffer layer thickness on the properties of AlxGa1-xN epilayer grown by HVPE”

Physica Status Solidi C, Vol.7, No 7-8, 1794-1797, (2010) 

https://doi.org/ 10.1002/pssc.200983634

2010.06

“Characterization of etch pit density for Gallium Nitride layer grown by HVPE and MOCVD”

Physica Status Solidi C, Vol.7, No 7-8, 1770-1774, (2010)

https://doi.org/ 10.1002/pssc.200983632

2010.04

“Reducing the warpage and dislocation density of GaN template grown by HVPE with gallium droplet treatments”




Presentation


Conference

Date

Title

IWGO 2022, October 23-27, 2022

2022.10

The effect of reactant gases on the surface morphologies of as grown surfaces in the homoepitaxial growth of (001) β-Ga2O3by halide vapor phase epitaxy

IWUMD 2022, May 23-26, 2022

2022.05

Growth of AlN layer on Hole-type PSS for DUV LED by HVPE

IWUMD 2022, May 23-26, 2022

2022.05

High quality AlN layer Growth with O2/H2 on c-plain sapphire substrate by HVPE

ICNS-12, July 24-28, 2017

2017.07

Characteristics comparison between GaN layer grown on patterned sapphire substrate and planer sapphire substrate by HVPE

IWN 2016, October 2-7, 2016

2016.10

High Quality AlN Epi-layer Grown by HVPE System

International Symposium on Single Crystals and Wafers, June 18-10,2016

2016.06

Multi-step growth of a-plane GaN epitaxial layer on r-plane sapphire substrate by HVPE method

ICNS-11 August 30-September 4, 2015

2015.08

The effects of growth temperature and V/III ratios for a-plane GaN epilayer on r-plane sapphire grown by HVPE

ICNS-11 August 30-September 4, 2015

2015.08

“High quality AlN layer regrown on AlN nano structure by using hydride vapor phase epitaxy”

ICNS-11 August 30-September 4, 2015

2015.08

The properties of chemical mechanical polished AlN epi-layer on sapphire grown by HVPE at relatively low temperature

Korea Association of Grystal Growth (KACG) June 03-05 ,2015

2015.06

The effects of changing growth temperature for aplane GaN epitaxial layrer grown by HVPE

IWN 2014 August 24-29, 2014

2014.08

Temperature and ratio effects on the growth of a-plane GaN/ r-plane sapphire by HVPE method

IWN 2014 August 24-29, 2014

2014.08

The effect of nitridation in AlN Growth on GaN Templlate by HVPE

17th ICMOVPE,  July 13~18, 2014

2014.07

-

17th ICMOVPE,  July 13~18, 2014

2014.07

Improvement of surface morphology for AlN epi-layer on sapphire by the controlled nitridation and V/III flow ratio in HVPE system 

CGCT-6, June 11~14, 2014

2014.06

Optical properties and crystallinity of aluminum nitrride epilayers grown by HVPE

CGCT-6, June 11~14, 2014

2014.06

Absorption coefficient of GaN wafers grown by Hydride Vapor Phase Epitaxy

CGCT-6, June 11~14, 2014

2014.06

The effects of the controlled nitridation and V/III ratio for AlN epitaxial layer grown on sapphire by HVPE

CGCT-6, June 11~14, 2014

2014.06

Improvements of Crystal Quality by Nitridation in AlN Grown on GaN Template by HVPE

ICAE, November 12-15, 2013

2013.11

The growth of semi-polar(11-22) GaN layer grown by HVPE with the control of gas flows on the semi-polar (11-22) GaN Template

ICAE, November 12-15, 2013

2013.11

Effects of Group V/III ratio and GaN inter-layer on the crystal quality of InN grown by HVPE method

ICNS-10, August 25-30, 2013

2013.08

Investigation for the distribution of stress for freestanding GaN after LLO process grown by HVPE

ICNS-10, August 25-30, 2013

2013.08

The Control of mechanical bow for GaN substrate grown by HVPE with relatively longer radiius of lattice curvature

The 2nd international Symposium on Single Crystal and Wafers, June 26-28, 2013

2013.06

The growth of thick semi-polar(11-22) GaN layer grown by HVPE on the semi-polar (11-22) GaN template

The 2nd international Symposium on Single Crystal and Wafers, June 26-28, 2013

2013.06

Optimization of freestanding thick GaN wafer bow grown by HVPE

The 2nd international Symposium on Single Crystal and Wafers, June 26-28, 2013

2013.06

Dislocation density of HVPE grown AlN epi-layer on sapphire substrate by X-ray rocking curve measurement

APWS 2013, May 12-15, 2013

2013.05

Improvement of AlN layer Growth on sapphire substrate by Relative low temperature HVPE

The 6th iIntermational Conference onf LED and Solid State Lighting, August.29-30,2012

2012.08

The effect of chemical mechanical polishing for the removals of the damage layers in the surface preparation of GaN substrate

The Korean Institute of Electrical and Electronic Material Enginners Annual Conference 2012

2012.06

Effect of high-temperature AlN buffer layer thickness on the properties of AlGaN epilayer grown by HVPE

The 1st international Symposium on Single Crystal and Wafers for LED, June 21-22,2012

2012.06

How to Reduce Manufacturing Cost of Free Standing GaN wafer by HVPE

The 1st international Symposium on Single Crystal and Wafers for LED, June 21-22,2012

2012.06

Study for Bowing of Free-Standing GaN Wafer by HVPE

The 1st international Symposium on Single Crystal and Wafers for LED, June 21-22,2012

2012.06

Growth and characteriation of The AlxGa1-xN Epilayers grown with the variation of Al input Flux Ratio by HVPE

ICMOPVE -XVI, May 20-25 2012

2012.05

Epitaxy of GaN on Si(111) substrate with AlcGa1-xN buffer layer by hydride vapor phase epitaxy method

ICMOPVE -XVI, May 20-25 2012

2012.05

Growth and characteriation of The AlxGa1-xN Epilayers grown with the variation of Al input Flux Ratio by HVPE

2011 Fall Meeting MRS (Material Research Society) November 28-December01, 2011

2011.12

“Effect of growth conditions on the properties of AlGaN epilayers grown by HVPE”

2011 ICAE (International Conference on Advanced Electromaterials), November 7-10, 2011

2011.11

“Growth of high quality GaN epitaxial layer with AlGaN buffer on silicon substrate by HVPE”

2011 ICAE (International Conference on Advanced Electromaterials), November 7-10, 2011

2011.11

“Effect of high temperature AlN buffer layer on the properties of AlxGa1-xN epilayer grown by HVPE”

2011 Fall meeting of Korean Ceramic Society, October 24-25, 2011

2011.10

“Growth of high quality GaN epitaxial layer with AlGaN buffer on silicon substrate by HVPE”

2011 IFFM (International Forum on Functional Materials), July 2011

2011.07

“The effects of growth temperate on the properties of AlGaN Epilayer grown by HVPE”

2011 KACG International Symposium on Crystal Growth, October 13-15, 2011

2011.10

“Growth of high quality GaN epitaxial layer with AlGaN buffer on silicon substrate by HVPE”

2011 Fall meeting of Korean Ceramic Society, October 24-25, 2011

2011.10

“Effect of growth conditions on the properties of AlGaN epilayers grown by HVPE”

5th 2011 APWS (Asia-Pacific Workshop on Widegap Semiconductors), May 22-26, 2011

2011.05

“Crystallinity improvement of GaN template grown by HVPE with the initial growth control”

5th 2011 APWS (Asia-Pacific Workshop on Widegap Semiconductors), May 22-26, 2011

2011.05

“Fabrication of high efficiency InGaN/GaN LED on thick GaN template grown by HVPE”

The 2nd Forum of Nitride semiconductor materials and Devices, April 2011

2011.04

GaN Wafer development trend

2011 The Korean Association of Crystal Growth, April 2011

2011.04

“The effects of growth temperate on the properties of AlGaN Epilayer grown by HVPE”

The 5th International Conference on LED & Solid State Lighting, April 11-12, 2011

2011.04

“Improvement of crystalline properties for GaN Template by the control of multi-step growths”

2011 Korea Conference of Semiconductors, February 2011

2011.02

“Effect of initial nucleation layer growth conditions on the properties of the GaN Epilayer grown by HVPE”

2010 The Korean Association of Crystal Growth, May 2010

2010.05

“Correlation between bowing and Raman shift of heteroepitaxial GaN grown by hydride vapor phase epitaxy

The 4th International Conference on LED & Solid State Lighting, February 2010

2010.02

“The effect of GaN layer thickness on the measured FWHM of X-ray rocking curve

2009 ICNS (International Conference on Nitride Semiconductors), October 18-23, 2009

2009.10

“Characterization of etch pit density for Gallium Nitride layer grown by HVPE and MOCVD”

2009 ICNS (International Conference on Nitride Semiconductors), October 18-23, 2009

2009.10

“Reducing the warpage and dislocation density of GaN template grown by HVPE with gallium droplet treatments”

2009 Society of LED and Solid State Lighting, January 20-22, 2009

2009.01

고분해능 X-회절분석에 의한 GaN Template의 결함 분석

2008 The Korean Association of Crystal Growth, April 2008.

2008.04

“Effects of patterned sapphire substrates on the bowing of MOCVD Grown GaN template”