Typical Specification of Products

2-inch GaN Wafer

· Thickness : ≤280㎛ ± 20 ㎛

· Size : 2-inch Round 

· Surface : Single Side Polished

· FWHM of (002) RC : ≤100 arcsec

· FWHM of (102) RC : ≤150 arcsec 

· Surface : Ra ≤ 1nm (5x5 ㎛²Scan by ARM)

· Resistivity : 5x10-² Ω·cm