Typical Specification of Products

20um Thick GaN Template

· Thickness : ≤20㎛ ± 10%

· Size : 2-inch and 4-inch Round

· Surface : Epi-Ready

· FWHM of (002) RC : ≤250 arcsec

· FWHM of (102) RC : ≤250 arcsec 

· Dislocation Density : ≤1x10/cm² (by CL)

· Resistivity : ≤5x10-² Ω·cm